A MOS capacitor is at 300 K on a Si substrate. The substrate is doped with 3×1015 cm−3 phosphorus atoms. What is the value of the semiconductor (depletion) charge at strong inversion? 1.6×10−11 C/cm2 −1.6×10−11 C/cm2 −2.56×10−8 C/cm2 2.56×10−8 C/cm2
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A MOS capacitor is at on a Si substrate. The substrate is doped with phosphorus atoms. What is the value of the semiconductor (depletion) charge at strong inversion?