An ideal MOS capacitor with an n+ polysilicon gate has a silicon dioxide thickness of tox = 12 nm = 120 Å on a p-type silicon substrate doped at Na = 1016 cm3. Determine the capacitance Cox, CFB′, Cmin′, and C′ (inv) at (a) f = 1 Hz and (b) f = 1 MHz. (c) Determine VFB and VT. (d) Sketch C′/Cox versus VG for parts (a) and (b).

An ideal MOS capacitor with an n+ polysilicon gate has a silicon dioxide thickness of tox = 12 nm = 120 Å on a p-type silicon substrate doped at Na = 1016 cm3. Determine the capacitance Cox, CFB′, Cmin′, and C′ (inv) at (a) f = 1 Hz and (b) f = 1 MHz. (c) Determine VFB and VT. (d) Sketch C′/Cox versus VG for parts (a) and (b).

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An ideal MOS capacitor with an n + polysilicon gate has a silicon dioxide thickness of t o x = 12 n m = 120 on a p-type silicon substrate doped at N a = 10 16 c m 3 . Determine the capacitance C o x , C F B , C min , and C (inv) at (a) f = 1 H z and (b) f = 1 M H z . (c) Determine V F B and V T . (d) Sketch C / C o x versus V G for parts (a) and (b).

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