The capacitance vs. gate voltage characteristic of a simple MOS capaci

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The capacitance vs. gate voltage characteristic of a simple MOS capacitor of area 100 μm×100 μm is as shown: Assume that there are no oxide charges. a) What is the thickness of the gate oxide (SiO2) ? b) Estimate the values of VFB and VT. c) Is the gate material metal or n+ poly-Si? How do you know this? d) Is the substrate lightly doped ( < 1018 cm−3) ? How do you know this?

The capacitance vs. gate voltage characteristic of a simple MOS capacitor of area 100 μm×100 μm is as shown: Assume that there are no oxide charges. a) What is the thickness of the gate oxide (SiO2) ? b) Estimate the values of VFB and VT. c) Is the gate material metal or n+ poly-Si? How do you know this? d) Is the substrate lightly doped ( < 1018 cm−3) ? How do you know this?

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The capacitance

v s

. gate voltage characteristic of a simple MOS capacitor of area

100 μ m \times 100 μ m

is as shown:

Assume that there are no oxide charges. a) What is the thickness of the gate oxide

({S i O}_{2})

? b) Estimate the values of

V_{F B}

and

V_{T}

. c) Is the gate material metal or

n +

poly-Si? How do you know this? d) Is the substrate lightly doped

(< 10^{18} {c m}^{- 3})

? How do you know this?

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